Sensitivity enhancement for micromechanical vibro‐impact resonators using snap‐through curved beams

This work enhances the driving sensitivity of micromechanical vibro-impact resonators by reducing output switching gap. Differing from previous works for gap narrowing that either require a dedicated pull-in bias voltage and stopper structures or post-fabrication refill processes, use snap-through technique calls only initial activation step without need constantly applied additional process steps. Doing so realizes final spacing typical 2-μm limitation to 0.9-μm sub-micron While probes are used mechanically initiate bistable transition in this proof-of-concept demonstration, could be done electrically once properly designed actuation electrodes available. transducer can help facilitate higher resonator embedded applications such as zero-quiescent power communication receivers.